| Patent Number |
Title Of Patent |
Date Issued |
| 6855929 |
Apparatus for inspection with electron beam, method for operating same, and method for manufactu |
February 15, 2005 |
| A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate "S" to be inspected into an inspection chamber 23-1 maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; moving |
| 6853143 |
Electron beam system and method of manufacturing devices using the system |
February 8, 2005 |
| An electron beam system wherein a shot noise of an electron beam can be reduced and a beam current can be made higher, and further a shaped beam is formed by a two-stage lenses so as to allow for an operation with high stability. In this electron beam system, an electron beam emitted fro |
| 6852802 |
Organic polymer material, process for producing the same, and heavy-metal ion remover comprising |
February 8, 2005 |
| An object of the present invention is to provide a heavy metal ion scavenger having more excellent scavenging performance than previously. In order to attain this object, organic polymer materials of the present invention are characterized in that they have a polymer side chain derived |
| 6852233 |
Metal-collecting apparatus and method for elution and recovery of metal from metal-collecting ma |
February 8, 2005 |
| An object of the present invention is to provide a structure of a metal collecting material for use in seawater or river water or industrial wastewater to give the most excellent adsorption efficiency. Another object of the present invention is to provide a process for efficiently se |
| 6852019 |
Substrate holding apparatus |
February 8, 2005 |
| The present invention relates to a substrate holding apparatus for holding a substrate to be polished and pressing the substrate against a polishing surface. The substrate holding apparatus comprises a top ring body for holding a substrate, an elastic pad for being brought into contact w |
| 6851152 |
Substrate cleaning apparatus |
February 8, 2005 |
| A substrate cleaning apparatus allows an end face and/or a bevel face of a substrate to be scrub-cleaned in a simple and effective manner. The apparatus has a plurality of rotatable substrate rotating rollers for gripping a periphery of the substrate and rotating the substrate, a cle |
| 6849857 |
Beam processing apparatus |
February 1, 2005 |
| A beam processing apparatus comprises a workpiece holder (20) for holding a workpiece (X), a plasma generator for generating a plasma in a vacuum chamber (3), first electrode (4) disposed in the vacuum chamber (3), and a second electrode (5) disposed upstream of the first electrode (4) i |
| 6847129 |
Turbine generator starting method and turbine generation system |
January 25, 2005 |
| An object of the present invention is to provide a turbine generation system in which a starting inverter circuit for starting a turbine generator is additionally employed so that the system comprises a high-power generation inverter and the starting inverter with low-power, thereby |
| 6844371 |
Material having separating function |
January 18, 2005 |
| An object of the present invention is to provide a separation functional material having more excellent adsorptive separation performance than previously. In order to attain this object, separation functional materials of the present invention are characterized in that they are forme |
| 6844274 |
Substrate holder, plating apparatus, and plating method |
January 18, 2005 |
| A substrate holder holds a substrate while hermetically sealing an outer circumferential edge and a reverse side of the substrate and exposing a surface of the substrate. The substrate holder has a base and a cover having an opening defined therein and positioned to place the substrate |
| 6843706 |
Polishing apparatus |
January 18, 2005 |
| A polishing apparatus is used for polishing a workpiece such as a semiconductor wafer to a flat mirror finish, and allows a polishing pad to be automatically replaced without stopping rotary or circulatory motion of a polishing table. The polishing apparatus comprises a polishing table f |
| 6842933 |
Substrate cleaning apparatus and cleaning member |
January 18, 2005 |
| A cleaning apparatus for cleaning a substrate includes a cleaning member, a cleaning member carrier for holding the cleaning member and bringing the cleaning member into contact with a substrate to be cleaned, and a sensor for detecting a presence/absence of a cleaning held by the cleani |
| 6839640 |
Method and apparatus for diagnosing damages of conductive materials |
January 4, 2005 |
| A diagnosing method and apparatus non-destructively performing damage evaluation of a piled up structure of conductive materials by using acoustic waves. The diagnosing method according to the present invention includes the steps of placing an electro-magnetic acoustic transducer 20 |
| 6835317 |
Method of making substrate with micro-protrusions or micro-cavities |
December 28, 2004 |
| A slider prevent the phenomenon of sticking and reduce entrapping of foreign particles between sliding surfaces. A method for making micro-protrusions or micro-cavities on a surface of a substrate comprises placing the substrate in a process chamber, supporting a mask member having a |
| 6835116 |
Polishing apparatus |
December 28, 2004 |
| A polishing apparatus for polishing a workpiece comprises a polishing table having a polishing surface and a top ring for holding the workpiece and pressing the workpiece against the polishing surface. The polishing table and the top ring are rotated independently of each other. The poli |
| 6833056 |
Desalination method and desalination apparatus |
December 21, 2004 |
| A desalination apparatus capable of obtaining fresh water stably at low cost by utilizing low-temperature waste, wherein the desalination apparatus including a heat exchanger 92 cooperating with an evaporation can 60 so as to subject a low-temperature waste heat 11 and raw water 62 i |
| 6830827 |
Alloy coating, method for forming the same, and member for high temperature apparatuses |
December 14, 2004 |
| Disclosed is an alloy coating which can be advantageously applied to members for high temperature apparatuses so as to prolong the service life of the members. The alloy coating comprises an alloy. This alloy comprises: at least one member, as a base, selected from the group consisti |
| 6829130 |
Power supply apparatus for supplying electric power to substrate carrier container |
December 7, 2004 |
| A power supply apparatus supplies electric power to a substrate carrier container having a rechargeable cell. The power supply apparatus comprises a body for seating a substrate carrier container thereon, a seating detecting device provided on the body for detecting whether the substrate |
| 6828225 |
Substrate processing method |
December 7, 2004 |
| A substrate procesing method comprising steps for forming a copper film on a surface of a substrate. These steps includes the step of filling a first metal in the trenches so as to form a plated film of the first metal on an entire surface of the substrate by electroplating, wherein the |
| 6828141 |
Method for purifying matter contaminated with halogenated organic compounds |
December 7, 2004 |
| A method for purifying matter contaminated with a halogenated organic compound is disclosed. The method includes the step of adding a reducing agent and a nutritional source for a heterotrophic anaerobic microorganism to the contaminated matter. The reducing agent is reduced iron, cast i |
| 6827633 |
Polishing method |
December 7, 2004 |
| A wafer is pressed against a fixed abrasive and brought into sliding contact with the fixed abrasive. Thus, the wafer is polished. A surface of the fixed abrasive is dressed so as to generate free abrasive particles thereon. A liquid or a gas, composed of a mixture of liquid or inert gas |
| 6824685 |
Method and apparatus for treating waste water |
November 30, 2004 |
| A wastewater treatment process involves solids-liquid separation after biological treatment, in which solids-liquid separation of activated sludge can be more efficiently performed. A mixture of wastewater and activated sludge obtained after biologically treating raw wastewater is in |
| 6824613 |
Substrate processing apparatus |
November 30, 2004 |
| A substrate processing apparatus can efficiently form, e.g. by electroless plating, an interconnects-protective layer on the surface of a substrate at a low initial cost for the apparatus and a low running cost without the need for a wide installation space. The substrate processing appa |
| 6824454 |
Polishing apparatus |
November 30, 2004 |
| A polishing apparatus for polishing a substrate comprises a turntable having a polishing surface, a substrate holder for holding a substrate and bringing the substrate into contact under pressure with the polishing surface, a dresser including a dresser tool adapted to be brought into |
| 6821902 |
Electroless plating liquid and semiconductor device |
November 23, 2004 |
| The present invention relates to an electroless-plating liquid useful for forming a protective film for selectively protecting surface of exposed interconnects of a semiconductor device which has an embedded interconnect structure formed by an electric conductor, such as copper or silver |
| 6818038 |
Polymer substrates for radiation-induced graft polymerization and filter stock |
November 16, 2004 |
| A radiation graft treated material in the form of a woven or non-woven fabric material that is composed of polymer monofilament fiber of which only the surface has undergone a radiation-induced graft polymerization but of which the center remains unaffected by grafting. |
| 6817406 |
Plate type heat exchanger |
November 16, 2004 |
| The present invention relates to a plate heat exchanger for simultaneously exchanging heat between two sets of fluids having different temperatures. The plate heat exchanger comprises a heat exchange element (2) comprising two plates facing each other so as to form a inner sealed space a |
| 6813894 |
Heat pump and dehumidifier |
November 9, 2004 |
| There are provided a heat pump having a high COP and a dehumidifying apparatus arranged in a compact size. The heat pump has a pressurizer 260 for raising a pressure of a refrigerant 260, an evaporator 210 for cooling a low-temperature heat source fluid A with heat of evaporation of the |
| 6811771 |
Bactericidal organic polymeric material |
November 2, 2004 |
| An object of the present invention is to provide a filter material capable of killing microorganisms, bacteria, fungi or viruses in air or liquids. Antimicrobial organic polymer materials of the present invention comprise an organic polymer material having a polymer side chain containing |
| 6811658 |
Apparatus for forming interconnects |
November 2, 2004 |
| A method and apparatus for forming interconnects embedding a metal such as copper (Cu) into recesses for interconnects formed on the surface of a substrate such as a semiconductor substrate. The method includes providing a substrate having fine recesses formed in the surface, subjecting |
| 6809449 |
Controlled magnetic bearing apparatus |
October 26, 2004 |
| A controlled magnetic bearing apparatus which generates a control signal based on a sensor signal from a displacement sensor for detecting a radial displacement of a rotor to suppress whirling of the rotor due to an external force synchronized with a rotational movement, and can hence |
| 6809448 |
Excimer laser apparatus |
October 26, 2004 |
| An excimer laser apparatus in which deterioration of the laser gas in the laser container can be suppressed, and damage to the magnetic bearings caused by the laser gas can be suppressed, and which can be reduced in size and operated efficiently, and has low power consumption. Each e |
| 6802762 |
Method for supplying slurry to polishing apparatus |
October 12, 2004 |
| A method for feeding slurry, and a slurry feeder capable of feeding slurry to a chemical mechanical polishing apparatus, are disclosed. Slurry is fed from a slurry supply tank, that stores slurry at a given concentration, to chemical mechanical polishing apparatuses via slurry feed pumps |
| 6802099 |
Cleaning member and cylindrical cleaning element |
October 12, 2004 |
| A rotary shaft having a predetermined diameter and a cylindrical cleaning element having an axial through-hole formed therein and capable of being either in a wet or a dry state are prepared. The through-hole has, in a wet state, a predetermined diameter smaller than that of the rotary s |
| 6800188 |
Copper plating bath and plating method for substrate using the copper plating bath |
October 5, 2004 |
| A copper plating bath comprising a reaction condensate of an amine compound and glycidyl ether and/or a quaternary ammonium derivative of this reaction condensate, and a plating method using this copper plating bath are disclosed. A copper plating bath capable of providing highly reliabl |
| 6797045 |
Scrubber |
September 28, 2004 |
| A scrubber including a casing having an exhaust gas inlet and an exhaust gas outlet. An impeller is mounted in the casing, and the impeller is rotatable about its own axis. An exhaust gas can be introduced into the center of the impeller through the exhaust gas inlet of the casing. A |
| 6796794 |
Combustor for waste gas treatment |
September 28, 2004 |
| A combustor for waste gas treatment having a flame stabilizing zone surrounded by a peripheral wall and closed with a bottom wall. The flame stabilizing zone is provided to face a combustion chamber. Burner ports for auxiliary combustible gas are provided in the peripheral wall to in |
| 6793820 |
Ethylene-vinyl alcohol hollow fiber membranes |
September 21, 2004 |
| EVAL microporous hydrophilic hollow fiber membranes are formed from a casting dope that includes low and high molecular weight pore-formers. Post-fabrication treatment includes stretching, hot water soaking and crosslinking. |
| 6793794 |
Substrate plating apparatus and method |
September 21, 2004 |
| The present invention relates to a substrate plating apparatus for plating a substrate in a plating bath containing plating solution. An insoluble anode is disposed in the plating bath opposite the substrate. The substrate plating apparatus comprises a circulating vessel or dummy vessel |
| 6793466 |
Vacuum pump |
September 21, 2004 |
| A vacuum pump is capable of preventing reaction products produced by a process gas from being precipitated in the pump, of holding various pump components in an allowable temperature range, and hence of operating in a wide operation range, and which has increased durability. The vacuum p |
| 6790763 |
Substrate processing method |
September 14, 2004 |
| A substrate processing method comprising steps for forming a copper film on a surface of a substrate. These steps includes the step of filling a first metal in the trenches so as to form a plated film of the first metal on an entire surface of the substrate by electroplating, wherein the |
| 6790421 |
Method for treating exhaust gas containing fluorine-containing compound |
September 14, 2004 |
| The present invention aims to provide exhaust gas treatment processes and systems capable of efficiently treating perfluoro-compounds (PFCs) for a long period. It also aims to provide exhaust gas treatment processes and systems capable of efficiently treating oxidizing gases such as F.su |
| 6787467 |
Method of forming embedded copper interconnections and embedded copper interconnection structure |
September 7, 2004 |
| Embedded interconnections of copper are formed by forming an insulating layer, forming embedded interconnections of copper in the insulating layer, making an exposed upper surface of the insulating layer and an exposed surface of the embedded interconnections of copper coplanar accor |
| 6785314 |
Electric discharge gas laser |
August 31, 2004 |
| There is provided an electric discharge gas laser comprising a housing, a rotating fan, a bearing device and a control. The housing contains a laser gas. The rotating fan is provided in the housing to circulate the gas in the housing. The bearing device magnetically supports a rotating s |
| 6785010 |
Substrate film thickness measurement method, substrate film thickness measurement apparatus and |
August 31, 2004 |
| A jet of water in a cylindrical form is supplied from a jet nozzle onto a measurement surface of a substrate to form a column of the water extending between the nozzle and the measurement surface. Light is emitted from an irradiation fiber and transmitted through the column of water to t |
| 6783445 |
Polishing apparatus |
August 31, 2004 |
| A polishing apparatus comprises a polishing table having a polishing surface thereon, a top ring for pressing a workpiece to be polished against the polishing surface, and a dresser for dressing the polishing surface on the polishing table. The dresser comprises a dressing element pr |
| 6783440 |
Polishing apparatus |
August 31, 2004 |
| A polishing apparatus has a top ring for holding a workpiece to be polished and a polishing table movable relative to the top ring. The polishing table has a polishing surface for polishing the workpiece held by the top ring. The polishing apparatus further has a polishing liquid supply |
| 6783427 |
Polishing system with air exhaust system |
August 31, 2004 |
| A polishing apparatus comprises: a housing defining a chamber wherein articles to be polished are subject to polishing and cleaning operations; partition walls for dividing the chamber of the housing into a plurality of sections; and, an air exhaust device. The exhaust device comprises: |
| 6782907 |
Gas recirculation flow control method and apparatus for use in vacuum system |
August 31, 2004 |
| A gas recirculation flow control method and apparatus for use in an evacuation system having a vacuum chamber into which a gas is introduced, a first vacuum pump for exhausting the gas from the vacuum chamber and reducing the pressure in the vacuum chamber to a desired pressure, a se |
| 6782301 |
Method for selecting centrifugal fluid machine by computer |
August 24, 2004 |
| An apparatus for selecting a centrifugal fluid machine according to the present invention can easily select a centrifugal fluid machine having a required performance from among a plurality of centrifugal fluid machines having an order of priority. The apparatus (1) for selecting a centri |
