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Dainichi Shoji Co., Ltd. Patents |
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Assignee: Dainichi Shoji Co., Ltd.
Address: both of, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 4714086 |
Apparatus for washing and drying substrates |
December 22, 1987 |
| A method for washing and drying a substrate and an apparatus therefor are disclosed which are capable of effectively rapidly carrying out the washing and drying of a semiconductor substrate in good yields without damaging and contaminating the substrate. The method comprises the steps |
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