| Patent Number |
Title Of Patent |
Date Issued |
| RE34049 |
Rod-less cylinder |
September 1, 1992 |
| A rod-less cylinder comprises a cylinder having an inner surface, an outer surface, a slit elongating in the longitudinal direction in the outer surface, and being formed by a pair of opposing side surfaces, a side recess on the inner surface, which has a width larger than that of the |
| D549077 |
Portion of a valve |
August 21, 2007 |
|
| D541905 |
Valve |
May 1, 2007 |
|
| D535549 |
Portion of a valve |
January 23, 2007 |
|
| D527073 |
Valve |
August 22, 2006 |
|
| D439633 |
Vacuum control valve |
March 27, 2001 |
|
| D375965 |
Rodless cylinder with a movable table |
November 26, 1996 |
|
| D375508 |
Rodless cylinder with a movable table |
November 12, 1996 |
|
| D371085 |
Pressure detecting device |
June 25, 1996 |
|
| D367863 |
Rodless cylinder with a movable table |
March 12, 1996 |
|
| 7407050 |
Tablet filling device and PTP packaging machine |
August 5, 2008 |
| It is to provide a tablet filling device having improved quality and productivity by correctly filling the tablets in pocket parts of a container film even when the tablets have a non-circular shape such as triangle. The tablet filling device 52 has a rotary drum 2 provided with hold |
| 7389969 |
Chemical liquid valve |
June 24, 2008 |
| A chemical liquid valve is arranged such that a diaphragm coupled to a piston rod is brought into/out of contact with a valve seat provided between an inlet port and an outlet port. To achieve a chemical liquid valve providing stable sealing strength, the diaphragm includes an engage |
| 7377736 |
Cylinder, load port using it, and production system |
May 27, 2008 |
| A cylinder which can precisely feed a piston rod 3 into three different positions. The cylinder includes a spring receiving member 14 which is placed coaxially with the piston rod in a piston room. Movement of the piston 4 is limited by one end of the piston room and a stopper 8 formed |
| 7357368 |
Combined valve |
April 15, 2008 |
| A combined valve is constructed by integrating a manual valve operating as a safety mechanism and a pilot valve. When a handle of a knob of the manual valve is in a safety mechanism release position, a valve mechanism can be opened and closed depending on whether or not there is air supp |
| 7353841 |
Relative pressure control system and relative flow control system |
April 8, 2008 |
| Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system inclu |
| 7343926 |
Liquid raw material supply unit for vaporizer |
March 18, 2008 |
| A liquid raw material supply unit for a vaporizer is adapted to supply a liquid raw material to the vaporizer that vaporizes the liquid raw material. The unit comprises: a manifold internally formed with a flow passage; and a plurality of fluid control valves mounted on the manifold, |
| 7322557 |
Chemical liquid control valve |
January 29, 2008 |
| A chemical liquid control valve is provided with a barrier on an outer circumferential end portion of a protruding part (an outer circumferential bottom portion of a valve seat). The barrier is placed so that an angle between the center line of an outlet passage and the line extendin |
| 7249749 |
Solenoid valve with 2-part fixed core |
July 31, 2007 |
| A solenoid valve capable of handling a corrosive control fluid and developing an increased attraction force. The solenoid valve 1 is adapted such that a fixed core is located in a wound coil 29 and protruding through the lower surface of the coil, a plunger 16 holding a valve sheet 1 |
| 7245387 |
Three-dimensional measuring instrument |
July 17, 2007 |
| For measuring the three-dimensional shape of an object of measurement using a phase shift method, a three-dimensional shortening the measurement time. A printed state inspection device 1 includes a printed circuit board K printed with cream solder H, an illumination device 3 for illu |
| 7090190 |
Flow control valve |
August 15, 2006 |
| There is disclosed a flow control valve which regulates a flow rate by determining a stop position of a piston by contact in an opened state, and which enables remote and high-precision flow rate regulation. In a closed state, an urging force of a return spring acts on a piston, brin |
| 7070160 |
Diaphragm valves |
July 4, 2006 |
| A diaphragm valve capable of increasing durability of a diaphragm comprises a valve body internally formed with a valve chamber having an open upper end and a suck-back chamber having an open lower end, between an inlet passage and an outlet passage, and a through hole which provides |
| 7019848 |
Three-dimensional measuring instrument, filter striped plate, and illuminating means |
March 28, 2006 |
| For measuring the three-dimensional shape of an object of measurement using a phase shift method, a three-dimensional measuring instrument is provided which is capable of shortening the measurement time. A printed state inspection device 1 includes a table for placing a printed circuit |
| 7017609 |
Gas supply unit |
March 28, 2006 |
| A gas supply unit includes fluid control devices and piping blocks so that the fluid control devices are mounted on the upper surfaces of the piping blocks and thus connected with each other, constituting a part of a gas supply line. A filter block including a filter element in a passage |
| 6928865 |
Thermal flowmeter having a laminate structure |
August 16, 2005 |
| The present invention relates to a thermal flowmeter capable of sensing a flow rate in either direction, having a linear output characteristic, and producing a stable output without impairing the response characteristic. In the thermal flowmeter, a laminate is fitted in a channel space f |
| 6913031 |
Pulse shot type flow controller and pulse shot type flow controlling method |
July 5, 2005 |
| A flow controller and a flow controlling method are adapted to be released from conventional restrictions by using a novel type called a pulse shot type. A pulse shot (opening/closing operation of a first cutoff valve (12) and, after that, opening/closing operation of a second cutoff val |
| 6886599 |
Gas supply unit |
May 3, 2005 |
| A gas supply unit includes a base member, two or more fluid control devices, and a plurality of passage blocks attached to an upper surface of the base member and lower surfaces of the fluid control devices to connect the fluid control devices in fluid communication. One of the passage |
| 6886401 |
Thermal flow sensor having sensor and bypass passages |
May 3, 2005 |
| A laminated filter is fit in a passage space formed in a body. The laminated filter is made of a mesh plate including a mesh part, a first blocking plate including a blocking part, a second blocking plate including a blocking part, and a third blocking plate including a blocking part |
| 6837919 |
Method for deaerating electrorheological fluid in a closed device |
January 4, 2005 |
| According to the present invention, electrorheological fluid is deaerated after it is sealed in a closed device which is operated by the electrorheological fluid. Thus, it is possible to control the operation of the closed device in accordance with an electric field. Additionally, the |
| 6799456 |
Thermal flow sensor |
October 5, 2004 |
| A board mounting thereon a measuring chip is fixed to a body in close contact relation to form a main passage and a sensor passage inside of the body, while a hot wire for a temp. sensor and a hot wire for a flow velocity sensor, both being provided on the measuring chip, are bridged |
| 6652212 |
Cylinder, load port using it, and production system |
November 25, 2003 |
| A cylinder of the invention can precisely send out a piston rod 3 into four different positions and comprises: a spring receiving member 14 placed coaxially with piston rod 3 in a piston room (I-II) of a cylinder tube 2 so that the movement of spring receiving member 14 is limited by one |
| 6648296 |
Hand-operated valve with locking mechanism |
November 18, 2003 |
| A hand-operated valve with a locking mechanism is disclosed. This valve includes: a valve main body including a valve body, a valve seat, and a screw mechanism which is actuated to bring the valve body into contact/noncontact with the valve seat; a locking mechanism for preventing ac |
| 6508268 |
Vacuum pressure control apparatus |
January 21, 2003 |
| A vacuum pressure control apparatus includes a vacuum proportional opening and closing valve 18 which is disposed on a pipe connecting a vacuum chamber 11 and a vacuum pump 19 and changes its opening to control the vacuum pressure in the vacuum chamber 11, and a pressure sensor 17 which |
| 6289737 |
Vacuum pressure control system |
September 18, 2001 |
| In a vacuum pressure control system, the vacuum pressure in a reaction chamber 10 is measured by vacuum pressure sensors 14 and 15 (S22), the measured value is changed at a set vacuum pressure changing speed commanded from the exterior or determined and stored in advance in a control |
| 6264246 |
Purge system and purge joint |
July 24, 2001 |
| A purge system has a purge gas piping system for substituting inert gas for process gas when a device connected in a process gas piping system is detached therefrom. In the purge system, a purge joint for connecting two pipes in the purge gas piping system is provided with an opening for |
| 6209571 |
Process gas supply unit |
April 3, 2001 |
| A process gas supply unit has a supply valve for supplying process gas to a semiconductor manufacturing apparatus, a purge valve for supplying inert gas, a check valve provided in a passage between an inert gas source and the purge valve and a common manifold provided with the supply val |
| 6158226 |
Trapping device |
December 12, 2000 |
| A trapping device is presented to improve production efficiency of vacuum processing devices. The trapping device comprises an exhaust path for evacuating process gas from a hermetic chamber through a vacuum pump; a regeneration path disposed adjacent to the exhaust path and comprising a |
| 6152175 |
Process gas supply unit |
November 28, 2000 |
| A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of |
| 6075605 |
Shape measuring device |
June 13, 2000 |
| A shape measuring device includes a light source for generating slit light beam and a polygon mirror for scanning the light beam and illuminating an object to be measured. The device further includes space-coding light beam controlling means, phase-shifting light beam controlling means, |
| 6041814 |
Vacuum pressure control system |
March 28, 2000 |
| In a vacuum pressure control system constituted of a vacuum vessel, a vacuum pump sucking gas in the vacuum vessel, a vacuum proportional opening and closing valve disposed on a pipe connecting the vacuum vessel and the vacuum pump, the vacuum proportional opening and closing valve c |
| 6026882 |
Tube connecting apparatus |
February 22, 2000 |
| A tube connecting apparatus for grasping and heating to melt and alternately connect the cut ends of a plurality of tubes is disclosed. A first tube holder and a second tube holder for grasping the tubes are provided with a pair of clamps having holding portions for holding a plurali |
| 5611209 |
Dehumidifier |
March 18, 1997 |
| A dehumidifier which vaporizes water separated from gas is disclosed. Relatively hot and humid air is cooled and dehumidified by a refrigerating passageway. Water separated from the hot and humid air is drained into a drainage container via a draining pipe. A plurality of fins extending |
| 5394755 |
Flow quantity test system for mass flow controller |
March 7, 1995 |
| In a flow quantity test system for a mass flow controller, a gas source for measurement is provided to supply gas for measurement. A cutoff valve for start of measurement is connected at its inlet port to the gas source for measurement and is connected at its outlet port to an inlet port |
| 5377721 |
Control apparatus for electroviscous fluid |
January 3, 1995 |
| A control apparatus for an electroviscous fluid has a pair of electrodes between which the electroviscous fluid is disposed and a control device for applying nearly-trapezoidal shaped pulses positive and negative voltages alternately across the electrodes to control viscosity of the |
| 5368062 |
Gas supplying system and gas supplying apparatus |
November 29, 1994 |
| A gas supplying system for supplying a corrosive gas or the like to a semiconductor manufacturing apparatus or the like. A plurality of kinds of component gases are introduced into a chamber and mixed therein to form a desired supply gas. After supplying the desired supply gas, the chamb |
| 5327740 |
Dehumidifier |
July 12, 1994 |
| A dehumidifier includes an elongated body in which a first open ended chamber and a second open ended chamber are defined parallel to each other along the longitudinal direction of the body. A first cover and a second cover are detachably secured to the ends of the body, to cover the ope |
| 5293812 |
Braking apparatus for cylinder |
March 15, 1994 |
| Disclosed is a braking apparatus for a rod-less cylinder. A transfer member (3) arranged outside a cylinder body (1) is coupled to a piston (2) disposed movably within the cylinder body (1), and moves together with the piston (2). A brake rail (8) is arranged on the outer side surface of |
| 5160179 |
Pipe coupler with split ring chuck |
November 3, 1992 |
| A pipe coupler is designed such that a sealing ring (5), an annular chuck (6) and a release ring (4) are inserted into a mounting recess (2) of a coupler main body (1). Annular reaction surfaces (601, 602) are provided at the tip side of the annular chuck (6), and an action surface (301) |
| 5134962 |
Spin coating apparatus |
August 4, 1992 |
| The present invention relates to a spin coating apparatus for feeding a clean liquid at a fixed rate. In any of the feeding apparatus in the prior art, no constituent other than a filter has the function of eliminating foreign matter, and the operation of feeding a liquid under precise |
| 5109582 |
Thread tensioning apparatus |
May 5, 1992 |
| A thread tensioning apparatus includes a pair of spaced arms that are simultaneously rotatable relative to supports to which the arms are mounted, a brush for catching threads and drawing out the threads from a thread beam, the brush being attached to the arms so as to be movable lon |
| 5101865 |
Dropper bar separating apparatus |
April 7, 1992 |
| AN apparatus individually separates a plurality of dropper bars which are suspended from a dropper supporting rod. A nozzle first blows the dropper bars along the dropper supporting rod to a position at which the dropper bars are to be separated. A lifting device lifts the lower end of a |
