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CI Systems Patents |
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Assignee: CI Systems
Address: Israel) Ltd. (Migdal HaEmek, IL
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5838014 |
Laser beam boresighting apparatus |
November 17, 1998 |
| Boresighting apparatus includes a laser, a thermal target having an absorbent surface for receiving the laser beam and converting it to a heat spot of infrared radiation, and an optical device for receiving and optically displaying the heat spot. The thermal target is anisotropic, ha |
| 5823681 |
Multipoint temperature monitoring apparatus for semiconductor wafers during processing |
October 20, 1998 |
| An emissivity compensating non-contact system for measuring the temperature of a semiconductor wafer. The system includes a semiconductor wafer emissivity compensation station for measuring the reflectivity of the wafer at discrete wavelengths to yield wafer emissivity in specific wa |
| 5322361 |
Method and apparatus for measuring temperature |
June 21, 1994 |
| A method and apparatus for measuring temperature by subjecting, to the temperature to be measured, a light-transmissive body of a material whose dimensions change in response to temperature, directing first rays of light from a light source through a first path including a predetermined |
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