| Patent Number |
Title Of Patent |
Date Issued |
| 7435712 |
Alkaline chemistry for post-CMP cleaning |
October 14, 2008 |
| This disclosure discusses cleaning of semiconductor wafers after the Chemical-Mechanical Planarization (CMP) of the wafer during the manufacturing of semiconductor devices. Disclosed is an alkaline chemistry for the post-CMP cleaning of wafers containing metal, particularly copper, i |
| 7297670 |
Acidic chemistry for Post-CMP cleaning using a composition comprising mercaptopropionic acid |
November 20, 2007 |
| This disclosure discusses cleaning of semiconductor wafers after the Chemical-Mechanical Planarization (CMP) of the wafer during the manufacturing of semiconductor devices. Disclosed is an acidic chemistry for the post-CMP cleaning of wafers containing metal, particularly copper, int |
| 7297181 |
Purification and transfilling of ammonia |
November 20, 2007 |
| An ammonia purification system includes a hydrocarbon removal station that removes hydrocarbons from gaseous ammonia via adsorption, a moisture removal station that removes water from gaseous ammonia via adsorption, and a distillation station including a distillation column connected wit |
| 7273588 |
Methods of sampling halosilanes for metal analytes |
September 25, 2007 |
| Methods for determining the amount of at least one metal analyte present in a liquid or gas sample of a halosilane supply (e.g., a chlorosilane supply) are disclosed herein. A sample of a halosilane supply is contacted and reacted with an aqueous hydrofluoric acid solution to produce |
| 7269991 |
Permeation calibrator |
September 18, 2007 |
| An apparatus, method, and system for ensuring a more accurate and precise calibration of gas or liquid analyzers using gas emitting permeation tubes for the production of calibration samples. The permeation devices are placed in a temperature-controlled housing to ensure that calibration |
| 7175696 |
Method and apparatus for corrosive gas purification |
February 13, 2007 |
| Herein is disclosed a method and an apparatus for preparing a highly purified gas from a crude liquid comprising the gas and one or more of a metal, particulates, water vapor, or a volatile impurity. The method comprises: (a) vaporizing the crude liquid, to yield (i) a first vapor st |
| 7174744 |
Method of improving the biocidal efficacy of dry ice |
February 13, 2007 |
| A manufactured dry ice product containing ozone entrapped or absorbed on said dry ice. The dry ice product can be used to chill and preserve food products and provides the added benefit of ozonation of the food product to kill bacteria. Novel processes for ozonating liquid and solid CO.s |
| 7137194 |
Apparatus and method for maintaining a dry atmosphere in a surface mount device placement machin |
November 21, 2006 |
| The apparatus and method of the present invention relates use a dry atmosphere in the component storage portion of the surface mount device placement machine. The dry atmosphere provides the benefit of eliminating the baking process and other moisture management issues. In accordance |
| 7098150 |
Method for novel deposition of high-k MSiON dielectric films |
August 29, 2006 |
| This disclosure discusses the forming of gate dielectrics in semi conductor devices, and more specifically to forming thin high-k dielectric films on silicon substrates typically using chemical vapor deposition or atomic layer deposition processes. The current invention forms a high- |
| 7087564 |
Acidic chemistry for post-CMP cleaning |
August 8, 2006 |
| This disclosure discusses cleaning of semiconductor wafers after the Chemical-Mechanical Planarization (CMP) of the wafer during the manufacturing of semiconductor devices. Disclosed is an acidic chemistry for the post-CMP cleaning of wafers containing metal, particularly copper, int |
| 7080655 |
Regulator for low concentration corrosive and reactive gases |
July 25, 2006 |
| A filter-less regulator is implemented for use in fluid flow systems that process low concentration reactive gases. The regulator includes an inlet, an outlet and a fluid flow path defined between the inlet and outlet by internal surfaces of the housing. The regulator further include |
| 7048777 |
Method and apparatus for removing waxy materials from a gas stream |
May 23, 2006 |
| The invention uses both heating and cooling zones to prevent the precipitation of solids onto equipment surfaces until they are efficiently removed from the gas phase via one or more heat exchangers. Each heat exchanger may be regenerated to melt off the solids when the amount collec |
| 7005645 |
Apparatus and methods for launching and receiving a broad wavelength range source |
February 28, 2006 |
| An apparatus and method for simultaneous detection of N gas species through laser radiation attenuation techniques is disclosed. Each of the N species has a spectral absorption band. N laser sources operate at a wavelength .lamda..sub.N in a spectral absorption band separated by the |
| 6999495 |
Method and apparatus for spatial energy coverage |
February 14, 2006 |
| A method and apparatus for increasing spatial energy coverage in a furnace is provided. The apparatus of the present invention includes a panel positioned at least partially into a sidewall of a furnace. The panel includes a plurality of openings for injecting a material through each of |
| 6943886 |
Method for enhanced gas monitoring in high particle density flow streams |
September 13, 2005 |
| A method for conducting laser absorption measurements in high temperature process streams having high levels of particulate matter is disclosed. An impinger is positioned substantially parallel to a laser beam propagation path and at upstream position relative to the laser beam. Beam shi |
| 6902937 |
Method for the determination of low-concentration anions in the presence of an excess of another |
June 7, 2005 |
| This invention relates to methods and apparatus for detecting, quantifying, and/or identifying trace quantities of an anion in the presence of an excess of another anion. One apparatus comprises a sample loop having a first end adapted to be connected to a sample-injection device and a |
| 6877219 |
Apparatus for placing components on printed circuit boards |
April 12, 2005 |
| The apparatus and method of the present invention relates use a dry atmosphere in the component storage portion of the surface mount device placement machine. The dry atmosphere provides the benefit of eliminating the baking process and other moisture management issues. In accordance |
| 6875415 |
Resin preconditioning methods using carbon dioxide and methods for purifying hydrogen peroxide |
April 5, 2005 |
| Provided are a preconditioned resin and methods of preparation thereof as well as methods for purifying hydrogen peroxide solutions. The method includes preconditioning an anion exchange resin, wherein an anion exchange resin bed is provided and carbon dioxide gas is passed through t |
| 6813902 |
Systems and methods for increasing production of spheroidal glass particles in vertical glass fu |
November 9, 2004 |
| A retrofit technology for air-fuel fired, vertical glass furnace for oxygen firing or boosting to provide additional heat to the process to increase furnace production capacity. The additional firing using oxygen is strategically controlled to enable enhanced radiation from oxygen flame |
| 6799883 |
Method for continuously blending chemical solutions |
October 5, 2004 |
| Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of: mixing a first chemical stream with a second chemical stream in a controlled manner, to form a stream of a solution having a predetermin |
| 6799526 |
Methods of improving productivity of black liquor recovery boilers |
October 5, 2004 |
| Methods of increasing the throughput of recovery boilers equipped with at least three levels of injection of air with oxygen enrichment of the air in at least one air level. In one method, a black liquor recovery boiler has three levels of air injection, and oxygen enrichment is applied |
| 6772781 |
Apparatus and method for mixing gases |
August 10, 2004 |
| Provided are apparatuses and methods for mixing gases. The apparatuses are suitable for use in the manufacture of an electronic device. The apparatuses include a gas mixing manifold. A first, bulk gas source is connected to introduce a flow of a first gas to the manifold. A second gas |
| 6762832 |
Methods and systems for controlling the concentration of a component in a composition with absor |
July 13, 2004 |
| Provided are methods and systems for controlling the concentration of a component in a composition, and semiconductor processing methods and systems. One exemplary method of controlling the concentration of a component in a composition involves: providing a composition which has a li |
| 6749691 |
Methods of cleaning discolored metallic arrays using chemical compositions |
June 15, 2004 |
| Methods of removing discoloration from a metal surface of an electronic device are presented the methods comprising the steps of exposing a metallic surface of an electronic device to a first composition comprising an organic reagent, the metallic surface having discoloration thereon, |
| 6748004 |
Methods and apparatus for improved energy efficient control of an electric arc furnace fume extr |
June 8, 2004 |
| A fume extraction system includes a combustion zone coupled with an exhaust outlet of a furnace to receive an exhaust gas stream emerging from the furnace outlet during system operation, where the exhaust gas stream includes explosive gases that undergo combustion reactions within the |
| 6684721 |
Method and apparatus for preparing a liquid sample |
February 3, 2004 |
| A method of preparing a liquid sample is provided. The method involves steps of: providing a pressurizable vessel that contains a liquid sample in a container, and a sample tube extending from beneath the surface of the liquid sample to a point outside of the vessel; introducing a purge |
