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Advanced Microsensors Patents |
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Assignee: Advanced Microsensors
Address: Shrewsbury, MA
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6900510 |
MEMS devices and methods for inhibiting errant motion of MEMS components |
May 31, 2005 |
| A Microelectromechanical (MEMS) device and method of fabrication that can minimize derailing of an actuable element of the MEMS device during fabrication can include a MEMS actuator to selectively generate displacement forces to displace an actuable element along a path between sidew |
| 6812055 |
MEMS devices and methods of manufacture |
November 2, 2004 |
| Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least |
| 6717227 |
MEMS devices and methods of manufacture |
April 6, 2004 |
| Microelectromechanical (MEMS) devices that use MEMS electromagnetic actuators to selectively generate displacement forces are disclosed herein. According to one exemplary embodiment disclosed herein, a MEMS device may include a substrate having a surface, an actuable element at least |
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