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Active Impulse Systems, Inc. Patents
Assignee:
Active Impulse Systems, Inc.
Address:
Natick, MA
No. of patents:
6
Patents:












Patent Number Title Of Patent Date Issued
6348967 Method and device for measuring the thickness of opaque and transparent films February 19, 2002
A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple
6256100 Method and device for measuring the thickness of thin films near a sample's edge and in a damasc July 3, 2001
A method for measuring a structure that contains overlying and underlying films in a region where the overlying film's thickness rapidly decreases until the underlying film is exposed (e.g., an edge-exclusion structure). The method includes the steps of: (1) exciting acoustic modes in a
6081330 Method and device for measuring the thickness of opaque and transparent films June 27, 2000
A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple
6075602 Method and apparatus for measuring material properties using transient-grating spectroscopy June 13, 2000
The invention provides an apparatus for measuring a property of a sample (using, e.g., ISTS) that includes: 1) an excitation laser that generates an excitation laser beam; 2) an optical system aligned along an optical axis that separates the excitation laser beam into at least three
6069703 Method and device for simultaneously measuring the thickness of multiple thin metal films in a m May 30, 2000
An apparatus for measuring a property of a structure comprising at least one layer, the appratus including a light source that produces an optical pulse having a duration of less than 10 ps; a diffractive element that receives the optical pulse and diffracts it to generate at least two
5812261 Method and device for measuring the thickness of opaque and transparent films September 22, 1998
A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple

 
 
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