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Act Advanced Circuit Testing Gesellschaft Fur Patents |
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Assignee: Act Advanced Circuit Testing Gesellschaft Fur
Address: Heimstetten, DE
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5637538 |
Method and apparatus for processing a specimen |
June 10, 1997 |
| The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of |
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