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ASM Genitech Korea Ltd. Patents |
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Assignee: ASM Genitech Korea Ltd.
Address: Daejon, KR
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7141278 |
Thin film forming method |
November 28, 2006 |
| A method for forming thin films of a semiconductor device is provided. The thin film formation method presented here is based upon a time-divisional process gas supply in a chemical vapor deposition (CVD) method, where the process gases are supplied and purged sequentially, and additiona |
| 7138336 |
Plasma enhanced atomic layer deposition (PEALD) equipment and method of forming a conducting thi |
November 21, 2006 |
| A plasma enhanced atomic layer deposition (PEALD) apparatus and a method of forming a conductive thin film using the same are disclosed. According to the present invention of a PEALD apparatus and a method, a process gas inlet tube and a process gas outlet tube are installed symmetricall |
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