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A L'Energie Atomique Patents
Assignee:
A L'Energie Atomique
Address:
Paris, FR
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
5635715 Process for the characterization of an insulator and the corresponding electron microscope June 3, 1997
Process and apparatus for the characterization of an insulator (5) at breakdown with the aid of an electron microscope (1), in which the electron flow rate of the beam (3) is adjusted as a function of in particular backscattered, lost, secondary or absorbed electrons. An automatic co

 
 
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