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ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung mbH Patents |
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Assignee: ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung mbH
Address: Munich, DE
No. of patents: 4
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5895917 |
Detector objective lens |
April 20, 1999 |
| The invention relates to a detector objective lens and a charged particle am device with such a detector objective lens containing a main lens for focussing a charged particle beam on a specimen, which consists of a magnetic lens (60) and an electrostatic lens (61) and a detector (62) |
| 5885354 |
Method and apparatus for processing a specimen |
March 23, 1999 |
| The invention relates to a method and to apparatus for processing a specimen, particularly an integrated circuit, in which an area of the specimen to be processed is scanned with a corpuscular beam and at least one gas is supplied above the area to be processed so that with the aid of |
| 5847399 |
Deflection system |
December 8, 1998 |
| A deflection system (6) for a charged particle beam (2), in particular for rrangement in an objective lens for a charged particle beam device with a deflection means (60) for generating a magnetic field acting on the charged particle beam (2) and a shield (61) for avoiding eddy currents, |
| 5808309 |
Apparatus for generating an electron beam |
September 15, 1998 |
| The invention relates to apparatus for generating an electron beam with an ptical waveguide, a light source which is coupled on one end of the optical waveguide, a coating for generated electrons which is applied to the other end of the optical waveguide as well as field-generating means |
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