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ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung Patents |
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Assignee: ACT Advanced Circuit Testing Gesellschaft fur Testsystementwicklung
Address: Munich, DE
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6051838 |
Optical unit |
April 18, 2000 |
| An optical unit having an electrostatic lens for influencing a particle beam wherein the lens has at least one first and one second electrode downstream of one another in the direction of the particle beam, each of the electrodes being chargeable with a potential and in electrical contac |
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