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ACT Advanced Circuit Testing Gesellschaft Patents |
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Assignee: ACT Advanced Circuit Testing Gesellschaft
Address: Munich, DE
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5780859 |
Electrostatic-magnetic lens arrangement |
July 14, 1998 |
| An electrostatic-magnetic lens arrangement is for focusing charged particles as well as a charged particle beam device with such a lens arrangement which has a magnetic lens and an electrostatic lens incorporated into the magnetic lens, the magnetic lens being constructed as a single |
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